25 October 2010


Epistar places multi-tool order for Veeco K465i GaN MOCVD systems

Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA says that Taiwan’s Epistar Corp of Hsinchu Science-based Industrial Park placed a multi-tool order for Veeco’s TurboDisc K465i gallium nitride (GaN) metal-organic chemical vapor deposition (MOCVD) system for high-volume light-emitting diode (LED) production.

“Since we qualified Veeco’s tools for production back in May, we have been extremely satisfied with their performance,” says Epistar’s president Dr M.J. Jou. “Given the systems’ ease-of-use and low cost of ownership, we now plan to include Veeco as an important supplier,” he adds.

“We are excited to continue to establish this strong relationship with Epistar in 2010, and pleased to support their current and future MOCVD requirements,” says Bill Miller Ph.D., executive VP, Compound Semiconductor and head of Veeco’s MOCVD operations.

With what is reckoned to be superior wavelength uniformity and run-to-run repeatability, Veeco says that the production-proven K465i extends its capital efficiency (the number of good wafers per day for each capital dollar) for high-volume LED makers. The K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance, the firm adds.

See related items:

Epistar qualifies Veeco’s K465i GaN MOCVD system as it ramps LED production capacity

See: Veeco Company Profile

Search: Veeco Epistar MOCVD K465i GaN LEDs



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