20 May 2010


Epistar qualifies Veeco’s K465i GaN MOCVD system as it ramps LED production capacity

Epitaxial deposition, process, and metrology equipment maker Veeco Instruments Inc of Plainview, NY, USA says that Taiwan’s Epistar Corporation has recently qualified Veeco’s TurboDisc K465i gallium nitride (GaN) MOCVD System for high volume LED production.

Epistar’s president Dr M.J. Jou said: “Ramping to production quickly and maintaining high throughput is critical to our success. Veeco enabled us to qualify the K465i rapidly and it provides the automation required to produce highly uniform LEDs with minimal downtime. The K465i provides Epistar the ease-of-use and system availability to meet our growing production requirements.”

Bill Miller, senior vice president, general manager of Veeco's MOCVD operations added: “As a result of this successful qualification, we currently expect to ship a significant number of tools to Epistar this year. We are excited that we have been chosen to support their volume capacity ramp in 2010. This is an important milestone for Veeco as we continue to build our Taiwan installed base.”

With what is reckoned to be superior wavelength uniformity and run-to-run repeatability, Veeco says that the production-proven K465i extends its capital efficiency (the number of good wafers per day for each capital dollar) for high-volume LED makers. The K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance, the firm adds.

Picture: Veeco's TurboDisc K465i MOCVD system.

See related items:

Sanan Optoelectronics places multi-tool order for Veeco K465i and E475 TurboDisc MOCVD systems

Genesis Photonics orders Veeco MOCVD systems

Seoul Optodevice continues expansion by adding Veeco MOCVD tools

Taiwan’s Epistar entering mainland China LED manufacturing

Veeco launches TurboDisc K465i GaN MOCVD system

See: Veeco Company Profile

Search: Veeco TurboDisc K465i GaN MOCVD LEDs Epistar