4 May 2010


Penn State selects Plasma-Therm multi-module ICP etch tool for Nanofabrication Research Lab

Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that Pennsylvania State University has chosen to add a Versalock ICP etch system to its Nanofabrication Research Lab.

The system is configured with two chambers and will be used for basic and applied research in fields such as nanotechnology, material science, electronics and photonics.

“With an installed base of more than 160 systems, the Versalock tool has proven its reliability in settings ranging from R&D to high-volume production,” says executive VP of sales & marketing Ed Ostan. “Plasma-Therm’s long involvement with leading research facilities like Penn State’s Material Research Institute and Nanofabrication Laboratory provides an opportunity to participate in science and technology at a fundamental level,” he adds.

As a member of the National Nanotechnology Infrastructure Network (NNIN), Penn State provides technical expertise in materials and chemical technologies at the molecular scale with strengths that include surface chemistry, self-assembly and the fabrication and processing of complex oxide materials. 

“This new equipment will significantly contribute to advances in cutting-edge process technologies that address challenges ranging from energy to medicine,” comments Nanofabrication Research Lab director of operations William Mansfield.

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