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Deposition equipment maker Aixtron AG of Aachen, Germany has received an order for several new AIX 2800G4 high-capacity MOCVD reactors Forepi Formosa Epitaxy Inc of Lung-Tan, Taoyuan, Taiwan. Forepi also ordered the Yield+ package to retrofit several of their existing systems. The combination will doubly augment Forepi’s manufacturing capacities for gallium nitride based epitaxial wafers, chips and ultra-high-brightness LED chip related products.

The new Yield+ package can improve can improve Forepi’s results, believes the firm’s president Dr Fen Ren Chien. “It was therefore natural that, when we came to order additional new G4 systems already including it, we should at the same time bring several of our existing reactors up to the same process performance,” he adds.

The Yield+ package features improved robustness and reproducibility for epitaxial growth, and provides better wavelength uniformity tuning due to an actively cooled gas inlet (which minimizes pre-reactions) and a triple gas injector (which offers an enhanced range of tuning parameters). These features guarantee higher throughput, better yield and cost per wafer for higher LED performance, says Aixtron.

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