4 December 2020
Picosun launches PicoOS unified control software
Picosun Group of Espoo, Finland, a provider of AGILE ALD (Atomic Layer Deposition) thin-film coating solutions for industrial manufacturing, has launched PicoOS, the new, full stack operating system and process control software for PICOSUN ALD equipment.
“PicoOS brings PICOSUN ALD equipment control to the modern era. It is designed for wafer fabs and industrial environments where the transition to Industry 4.0 is ongoing,” says Dr Jani Kivioja, chief technology officer of Picosun Group. “Data-driven PicoOS enables future production solutions where machine learning, artificial intelligence, Internet of Things and other new digital inventions are utilized for optimum industrial efficiency.”
Picosun’s proprietary PicoOS software combines individual ALD module, wafer handling and transfer system, and instrumentation control under one common graphical HMI (human-machine interface). This ensures easy, intuitive and user-friendly operation, maintenance and configuration of the whole PICOSUN ALD cluster.
PicoOS enables full factory integration via SECS/GEM protocol, process and system data logging down to 20ms rate, and real-time export of all data for continuous monitoring and further analysis.
The PicoOS operating system is specifically developed by Picosun’s own in-house software team for the company’s fully automated production ALD systems Morpher and Sprinter, and it will be implemented in all future PICOSUN ALD tool platforms.
“PicoOS is designed to ensure the highest control precision and accuracy, the fastest service times, and the best user experience for our customers,” continues Kivioja. “Having in-house control over all features and sub-components of our PICOSUN ALD solutions is a key part of our holistic service model.”
PicoOS has a freely configurable and scalable editor for ALD process recipe and processing job creation and storage, and recipes can be edited or new ones created at any time during the ALD system operation. Configurable user levels and safety logic, instrumentation and interlocks guarantee safe use in day-to-day operations, and allow full access for tool management in maintenance situations. Maintenance procedures are sped up by specific clean-up and maintenance sequences inbuilt in the software.