4 December 2020
Plasma-Therm acquires OEM Group’s PVD, RTP & etch business
Plasma-Therm LLC of St Petersburg, FL, USA (which makes plasma etch, deposition and advanced packaging equipment for specialty semiconductor and nanotechnology markets) has acquired the dry process equipment business of OEM Group of Phoenix, AZ, USA (which supplies new and re-manufactured semiconductor capital equipment and upgrades focused on emerging markets).
With the acquisition, Plasma-Therm has acquired all original OEM licenses and intellectual property rights for SFI Endeavor, AG Heatpulse, MRC Eclipse and Tegal brand equipment. Plasma-Therm will continue to support existing customers through spare parts and upgrades, while offering new and refurbished tools to the wider market.
“The acquisition allows Plasma-Therm’s award-winning customer service teams to support the large and global install base,” says Plasma-Therm’s CEO Abdul Lateef. “Additionally, PVD and RTP technologies align perfectly with our etch and deposition products and process solutions, which will further support the manufacturing and R&D needs and requirements of our customers,” he adds.
“We are delighted to have had these outstanding products acquired by PlasmaTherm, ensuring a strong path to market for our newly developed Endeavor M series PVD platform, and the continued availability and support of the MRC Eclipse, AG Heatpulse, and Tegal products,” comments OEM Group’s CEO Michael Correra. “This acquisition allows OEM Group to strategically focus on our wet chemical process and ion implant technologies.”
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