AES Semigas


26 February 2020

Astrum LT chooses LayTec’s EpiX wafer mapper for VCSEL manufacturing

In-situ metrology system maker LayTec AG of Berlin, Germany says that its EpiX wafer mapping station has been chosen by Astrum LT UAB of Vilnius, Lithuania for vertical-cavity surface-emitting laser (VCSEL) production at its new Astrum LT s.r.o. facility in Kralupy nad Vltavou near Prague, Czech Republic.

Astrum LT s.r.o. was set up to offer high-power gallium arsenide (GaAs)-based devices - including edge-emitting lasers (EELs) and VCSELs - for medical, industrial, automotive, spectroscopy and consumer electronic applications.

The stand-alone metrology tool will help Astrum LT to determine post-growth wafer uniformity and to better understand the growth process in its metal-organic chemical vapor deposition (MOCVD) reactor.

LayTec’s EpiX mapping stations combine spectroscopic white-light reflectance and photoluminescence detection with an XY-mapping stage and provide a comprehensive 2D analysis of optical wafer properties by non-contact measurement. In combination with the in-situ results of LayTec’s EpiCurve TT VCSEL installed on its MOCVD system, Astrum LT will be able to correlate live run data - like growth-temperature distributed Bragg reflector (DBR) mirror or cavity position - with the room-temperature results from the EpiX mapping station.

Tags: LayTec Metrology



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