AES Semigas


14 February 2020

Veeco launches Lumina As/P MOCVD platform

Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has launched the Lumina metal-organic chemical vapor deposition (MOCVD) platform, which incorporates the proprietary TurboDisc reactor technology for what is claimed to be outstanding film uniformity, yield and device performance for a variety of photonics applications. The new MOCVD platform, including the Lumina R480 and Lumina R480S models, will accelerate the production of vertical-cavity surface-emitting laser (VCSEL), edge-emitting laser (EEL) and mini/micro-LED devices.

In response to strong consumer demand for arsenic phosphide (As/P) MOCVD technology, the Lumina platform targets a new generation of high-efficiency photonics devices including VCSELs used in 3D sensing, autonomous driving and high-speed data communication. The Lumina platform is also designed for mini- and micro-LED production for advanced displays found in next-generation 4K and 8K televisions, smartphones and wearable devices, as well as EEL devices used for optical communications and silicon photonics applications.

“Leading photonics manufacturers are currently seeing the benefits of our Lumina MOCVD system and are validating its impact in the manufacturing of high-volume photonics devices,” says Gerry Blumenstock, senior VP, product line management. “With its proven design, technology and performance, Lumina provides exciting opportunities for the next generation of photonics devices,” he believes.

The Lumina R480 and R480S systems are based on Veeco’s MOCVD TurboDisc technology which features high uniformity and low defectivity over long campaigns for high yield and flexibility. In addition, the firm’s proprietary technology drives uniform thermal control for what is claimed to be excellent thickness and compositional uniformity. Providing a seamless wafer size transition, the system is capable of depositing high-quality As/P epitaxial layers on wafers up to 6-inches in diameter. The R480 and R480S systems allow users to customize their systems for maximum value, says Veeco.

Tags: Veeco MOCVD



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