30 July 2020
AMEC launches Prismo HiT3 MOCVD system for DUV LED mass production
Shanghai-based Advanced Micro-Fabrication Equipment Inc China (AMEC) has debuted its Prismo HiT3 metal-organic chemical vapor deposition (MOCVD) system, which is engineered to mass produce deep-ultraviolet light-emitting diodes (DUV LEDs).
The system is the newest addition to AMEC’s portfolio of Prismo MOCVD products, which are already in use for the production of blue LEDs. With a maximum reactor chamber temperature of 1400°C, the tool enables the growth of aluminium nitride (AlN) and high-aluminium component materials with what is claimed to be excellent process performance, superior wafer uniformity and low defectivity. Built for high throughput, the system can process up to 18 2-inch epitaxial wafers per run, with extendibility to 4-inch wafers.
Early customers include China-based Jason Semiconductor Co Ltd, a producer of DUV LEDs for home applications, medical instruments and products used for scientific research.
DUV light has been used for decades as a disinfectant for industrial and consumer applications. It works by disrupting the DNA of bacteria and viruses, and killing their reproductive capabilities. The emergence of pathogens like SARS, MERS and COVID-19 has increased demand for DUV LED products with the wavelength power to destroy new micro-organisms. The existing state-of-the-art for this purpose is the DUV LED, with emission wavelengths of 260-280nm.
AMEC says that the Prismo HiT3 system’s novel chamber design features a range of enabling technologies to grow AlN at extremely high process temperatures and delivers high yield. An automatic vacuum transfer system prevents particle generation and keeps defects low. The process is automated and offers what is claimed to be a longer mean time between maintenance (MTBM) than the closest competitive tool, further maximizing uptime and production capacity.
“Today, we’re seeing the benefits of DUV LEDs in real time, with the technology now an important tool used to destroy harmful pathogens,” notes Jason’s chairman Jian Kang. “As the science of DUV LED technology continues to advance, we are proud to operate at the leading edge with products to disinfect public environments, as well as the home. AMEC’s Prismo HiT3 system can meet the high-volume/low-cost-of-ownership manufacturing imperatives for DUV LEDs,” he comments.
“The Prismo HiT3 system contains all the innovative features of our proven Prismo platform, now with new ultra-high-temperature process capabilities for AlN-based DUV LED applications,” says executive VP & chief operating officer Dr Zhiyou Du. “Jason is an early user. The company is known for stretching the limits of LED technology and creating products that benefit human health,” he adds. “We’re glad that our equipment solutions are helping them meet their technology and cost goals for next-generation DUV LEDs.”
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