AES Semigas


24 June 2020

k-Space receives multi-tool metrology order from Veeco

k-Space Associates Inc of Dexter, MI, USA – which makes in-situ, ex-situ and in-line thin-film metrology instrumentation for both research and manufacturing of microelectronic, optoelectronic and photovoltaic devices – has received a multi-system order from epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA consisting of multiple units each of kSA UV BandiT, kSA MOS with spectral reflectance and kSA 400 metrology systems.

Veeco will incorporate the kSA metrology tools onto a multi-deposition-chamber GEN200 MBE system configured for the growth of nitride materials. The GEN200 is a high-performance and cost-effective multi-4”-wafer production MBE system, used in leading production MBE facilities worldwide.

“k-Space and Veeco have a long and successful partnership working together in the molecular beam epitaxy (MBE) deposition market,” says k-Space’s CEO Darryl Barlett. “We have worked closely with Veeco to supply in-situ metrology that communicates directly with Veeco’s control software, giving the end user complete monitoring and control over their deposition process.

The kSA UV BandiT is designed for in-situ temperature monitoring of wide-bandgap semiconductors in ranges that pyrometers cannot measure, including temperatures of substrates that are transparent in the infrared (IR) and visible wavelength ranges. The kSA UV BandiT monitors temperature via band-edge-based absorption spectra in the range 200-500nm.

The kSA MOS is a complete curvature, stress, reflectivity and growth rate in-situ metrology instrument. k-Space has created a custom configuration that includes capabilities for both standard kSA MOS measurements and spectral reflectance monitoring in the 380-1100nm range.

Both the kSA BandiT and kSA MOS use kSA patented technology.

The kSA 400 is a powerful analytical reflection high-energy electron diffraction (RHEED) system with state-of-the-art software. This system captures static and real-time data and uses the robust analysis tools in the software to analyze the RHEED data.

k-Space will ship the systems to Veeco this summer for eventual installation at the customer site.

Tags: k-Space Associates Veeco




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