4 October 2021
Montpellier’s NanoMIR group orders Riber MBE system for antimonide research
Riber S.A. of Bezons, France – which manufactures molecular beam epitaxy (MBE) systems as well as evaporation sources and effusion cells – says that it has received an order for a fully automatic, multi-chamber Compact 21 DZ research MBE system from the University of Montpellier’s NanoMIR group, which specializes in antimonide-based (III-Sb) compound semiconductor materials.
NanoMIR is a research group of ‘Institut d’Electronique et des Systèmes’, which is a research laboratory of Université de Montpellier jointly operated by France’s national center for scientific research CNRS (Centre national de la recherche scientifique). For the last ten years, nanoMIR has focused mainly on developing mid-infrared optoelectronic devices (lasers and photodetectors) based on gallium antimonide (GaSb), indium arsenide (InAs), aluminium antimonide (AlSb), indium antimonide (InSb), their alloys and their heterostructures.
The equipment order has been funded under the ‘HYBAT’ project (ANR-21 -ESRE-0026) by the Investments for the Future program (PIA), managed by the French National Research Agency (ANR).
The system comprises two chambers configured for the MBE growth of antimonide-containing compounds, and a third chamber for remote-plasma-assisted chemical vapor deposition (RP-CVD) of silicon germanium (SiGe). To optimize process control, the system will be equipped with Riber’s new EZCURVE instrument, a metrology tool enabling real-time in-situ precision control and characterization of the MBE growth process. This multi-chamber system will be applied to the development of novel III-V infrared photonics materials deposited on silicon wafers and novel quantum structures (areas of strategic interest throughout Europe).
“The new Compact 21 DZ cluster will extend and reinforce our existing Riber MBE 412 and Compact 21 cluster capability to increase the range of possibilities we can explore in our research and development on mid- to long-wavelength infrared and quantum devices,” says professor Eric Tournié, MBE group leader at the University of Montpellier. “Our existing Riber MBE installations have been exceptionally stable and reproducible over the short and long term; this is a pre-requisite to grow the complex III-Sb structures needed for our work. We are already familiar with the new EZ-CURVE tool, which we know is going to extend our reach in precision and perfection as we set out to grow ever more demanding device materials,” he adds.
“This new order consolidates Riber’s already unequivocal position as the global market leader in the supply of MBE equipment for optoelectronic materials containing antimonide,” believes Riber’s chairman Philippe Ley.