15 October 2021
Veeco receives multi-system order for new dual-technology platform
Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has received a multi-system order from a leading semiconductor maker for its new ADS-800 SRD system.
Fully qualified for production in July, the new system combines wafer dicing and wet cleaning technologies into a small-footprint platform suitable for silicon carbide (SiC)-based power electronic devices. The systems will be used to accelerate production of power electronics used in vehicles.
“We were able to integrate our advanced dicing system and wet processing technologies to offer a truly unique solution that improves device performance, increases throughput and reduces cost of ownership,” says Adrian Devasahayam Ph.D., senior VP, Product Management. “Our dicing capabilities and small footprint in particular enable a 25% cost of ownership benefit,” he adds. “We have received terrific feedback from this customer, and we are proud of the opportunity to solve difficult material challenges that will drive the future of electric vehicles.”