AES Semigas


27 September 2021

Axcelis ships full family of Purion SiC Power Series implanters to power device makers

Ion implantation system maker Axcelis Technologies Inc of Beverly, MA, USA says that in third-quarter 2021 it shipped its full family of Purion SiC Power Series ion implanters to several leading power device chipmakers in Asia and Europe.

The shipments include follow-on orders for the Purion H200 Power Series SiC high-current implanter and the Purion M Power Series SiC implanter, as well as a Purion XE Power Series SiC high-energy implanter, which is a new evaluation tool to a new customer.

The systems will be used in high-volume production of silicon carbide (SiC) power devices supporting automotive, mobile and Internet of Things (IoT) markets.

“The growing momentum in the electrification of the automotive industry is driving a strong demand for SiC power devices, and Axcelis is the only company with a complete family of ion implanters to support this transition,” says executive VP of product development Bill Bintz. “Our leadership position in the power device market continues to grow due to the Purion SiC Power Series platform’s common and flexible architecture, coupled with its highly differentiated silicon carbide process capabilities,” he adds. “We look forward to supporting our customers’ goals to improve power device performance and expand manufacturing capacity, by providing innovative, segment-focused Purion products that solve customers’ high-value, high-impact emerging implant challenges.”

Tags: SiC devices Power electronics ion implanters