8 July 2022
LayTec adds fully automated wafer handling and cassette-to-cassette loading to EpiX mapping station
After introducing its EpiX mapping station some years ago, in-situ metrology system maker LayTec AG of Berlin, Germany is now bringing its newest EpiX generation to the market. The first demonstration unit of the new system is being displayed in the firm’s booth at the 20th International Conference on Metal Organic Vapor Phase Epitaxy (ICMOVPE XX) in Stuttgart, Germany (10-14 July).
As with previous EpiX generations, the new system is equipped with white light reflectance and multi-wavelength photoluminescence spectroscopy for wafer inspection.
Now the system has been equipped with fully automated wafer handling and cassette-to-cassette (C2C) wafer loading to also serve the requirements of high-throughput industrial applications.
Also, Dr Johannes Zettler is giving a detailed presentation about the new product at LayTec‘s in-situ seminar at ICMOVPE XX.