16 May 2022
amcoss supplies coating & developing wafer process system to Jenoptik
amcoss GmbH of Feldkirch, Austria (which develops and makes customized processing equipment for coating, developing, temperature control and cleaning, as well as lift-off and etching of substrates and masks) has supplied high-power, edge-emitting laser manufacturer Jenoptik with a fully automatic amc 2000 wafer processing unit for coating and developing wafers. Jenoptik will use the equipment in lithography processing at its site in Berlin-Adlershof, Germany.
“The amcoss equipment is a replacement tool. Our goal is to significantly increase capacity and yield, compared to the tool we have been using so far, which will noticeably raise productivity,” says Dr Jürgen Sebastian, site manager at Jenoptik Berlin, which produces high-power diode lasers for medical applications, materials processing, R&D, and pump sources for solid-state lasers. “Furthermore, we need optimized wafer centering and more flexible application possibilities for 3” and 4” wafers,” he adds. “With amc 2000 we are sure to reach these goals and to even increase quality and efficiency in wafer processing.”
amcoss says that its wafer processing equipment is configured according to individual customer needs, so that each tool is unique. “We do not build mass products, but each of our machines is a highly complex single piece,” says company owner David Erne. “So, amc 2000 for Jenoptik has been designed for highest throughput. With its dual arm handler and four loadport stations for parallel operation of up to four processes, it absolutely is a high-throughput tool.” In addition, a space-saving, integrated alignment-on-the-fly prealigner may alternatively be used, if flat orientation is necessary.
amcoss says that the amc 2000 system’s flexible layout makes it a bridge tool. Jenoptik can now simultaneousely process different wafer sizes – namely the required 3” and 4” diameters – without the need for adaptation when changing size. By fitting the tool with five dispense lines with a unique single-nozzle-gripper system and an additional syringe, flexibility is increased even more, adds the firm. Various hot-plates and cool-plates, a special vapor prime hotplate and an efficient EBR system complete the configuration.
In addition to the new amcoss wafer processing tool, an amc 2500 system has also been installed at the Jenoptik site in Dresden.