AES Semigas

IQE

10 February 2025

Taiyo Nippon Sanso selling BRUTE Peroxide in Japan

After supplying Peroxidizer highly concentrated hydrogen peroxide gas delivery systems since 2013, industrial gas company Taiyo Nippon Sanso Corp (TNSC) of Tokyo, Japan (part of Nippon Sanso Holdings Group) has added to the BRUTE suite of chemicals by beginning to sell BRUTE Peroxide in Japan.

In recent years, hydrogen peroxide (H2O2) has attracted wide interest as a promising new reactant because of its ability to deposit high-quality films at low temperatures, compared with conventional alternatives.

Peroxidizer has received a process-of-record from a major device manufacturer that can supply hydrogen peroxide at a high flow rate and concentration for mass-production processes. Moreover, TSNC has received requests from users to minimize the amount of water carried along with hydrogen peroxide.

California-based TNSC group company RASIRC Inc (which provides materials and vaporizers for semiconductor manufacturing processes using its membrane separation technology) has therefore developed and sold BRUTE Peroxide as a new hydrogen peroxide supply source in a stainless canister with proprietary adsorbent technology that enables safe handling and stable delivery of highly concentrated hydrogen peroxide vapor with lower water content for semiconductor fabrication processes, enabling a lower entry-point for the use of hydrogen peroxide.

The characteristics of the product are as follows:

  • The conventional bubbling method of using a hydrogen peroxide solution can only supply up to a few hundred ppm of hydrogen peroxide, due to limitations posed by Raoult’s Law. However, BRUTE Peroxide can supply hydrogen peroxide at more than 100 times higher concentration.
  • The canister-type source offers users easy handling, a low initial cost, and the immediate use of hydrogen peroxide within customer tools, making it suitable for R&D as well as low-volume production processes.

Future plans

TSNC plans to expand the sale of BRUTE Peroxide to R&D applications as well as low-volume production process requirements, mainly targeting advanced semiconductor segments such as logic and memory. In addition, coupled with Peroxidizer, TSNC plans to expand the range of applications of hydrogen peroxide to optical devices and biomedical segments, where it has seen a significant increase in the number of inquiries.

See related items:

Taiyo Nippon Sanso develops high-purity hydrazine gas delivery system

Taiyo Nippon Sanso launches UR26K-CCD MOCVD system for GaN mass production

Tags: Taiyo Nippon Sanso

Visit: www.tn-sanso.co.jp/en

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