AES Semigas

Honeywell

8 May 2026

Aixtron supplies Planetary G5+C MOCVD systems to Renesas

Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany has supplied Renesas Electronics Corp of Tokyo, Japan with multiple Planetary G5+C systems to expand its gallium nitride (GaN) production in high-volume manufacturing (HVM) environments. The collaboration helps to strengthen Renesas’ GaN production capabilities in response to surging demand across critical power electronics applications.

Since the acquisition of Transphorm in June 2024, Renesas has been accelerating the deployment of GaN technology in e-mobility and automotive, advanced Internet of Things (IoT) solutions, fast-charging infrastructure, AI data-center power architectures, as well as renewable energy and industrial sectors to enable efficient and compact power conversion at scale.

Optimized for high-throughput and uniformity, Aixtron’s Planetary metal-organic chemical vapor deposition (MOCVD) systems are engineered to support the seamless scaling of Renesas’ GaN power device manufacturing. The systems have already been delivered and are fully operational.

“GaN is one of the fastest-growing segments in our industry and is becoming a key growth driver for our Power Business,” says Rohan Samsi, vice president, GaN business division, Power Product Group at Renesas. “We are excited to build on the proven Planetary platform, originally introduced at Transphorm, and to seamlessly expand our production capacity with additional Aixtron GaN Planetary systems,” he adds.

“Renesas’ strategy to ramp up GaN production in high-volume manufacturing sends a clear signal of accelerated momentum in the wide-bandgap sector,” says Dr Nicolas Müsgens, director product management GaN at Aixtron. “As a long-standing technology partner, we support this expansion with our proven Planetary MOCVD production solutions,” he adds. “The order for additional Aixtron GaN Planetary systems demonstrates Renesas’ strong commitment to large-scale GaN manufacturing.”

See related items:

Renesas completes acquisition of Transphorm

Transphorm scales up to 200mm wafers with Aixtron AIX G5+ GaN-on-Si system

Tags: Aixtron Renesas

Visit: www.renesas.com/power

Visit: www.aixtron.com

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