AES Semigas


23 June 2021

AMEC launches Prismo UniMax MOCVD system for mini-LED production

As the latest addition to its portfolio of Prismo metal-organic chemical vapor deposition (MOCVD) products, which are already in use by many gallium nitride (GaN)-based LED makers, Shanghai-based Advanced Micro-Fabrication Equipment Inc China (AMEC) has launched the Prismo UniMax, which is engineered for high-performance mini-LED production.

With increasing demand for applications in LED-based TVs, tablets, laptops, monitors, smartphones, automotive displays etc, mini-LEDs are gaining popularity as an emerging technology that can significantly enhance display quality by delivering superior brightness, precise dynamic response and excellent contrast. The UniMax system is hence engineered to help address the challenges in mini-LED production.

AMEC’s new Prismo UniMax MOCVD system. Picture: AMEC’s new Prismo UniMax MOCVD system.

The new system can accommodate up to four reactors which can be controlled independently. With its local temperature-adjustable heating system, the UniMax can deliver what is claimed to be excellent wavelength uniformity, repeatability and reliability for mini-LED production. Other novel features include an optimized showerhead for better uniformity and production stability, and a large-sized susceptor that can significantly improve production throughput and reduce cost of ownership (CoO). Built for high throughput, the system’s high wafer capacity is extendable to 164 4-inch or 72 6-inch wafers through susceptor configuration change.

AMEC says that it has received orders for the system from leading customers in China, while more customer demonstrations are in progress.

“With core technology evolved from our proven Prismo platform, the UniMax system is the most innovative MOCVD tool that provides a cost-effective solution for high-performance mini-LED production,” says chairman & CEO Dr Gerald Yin. “Prismo UniMax has been used by leading LED customers in China. The tools can not only meet the stringent technical requirements but also achieve higher productivity with lower cost of ownership,” he adds. “A new uprising market for MOCVD is coming earlier than expected. We are looking forward to work together with our customers and partners to further accelerate the development of mini-LED technology and the MOCVD market.”

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AMEC debuts MOCVD platform for high-volume HB-LED manufacturing, with extendibility to GaN-on-Si