26 July 2023
Axcelis ships Purion H200 SiC Power Series ion implanter to Wolfspeed
Ion implantation system maker Axcelis Technologies Inc of Beverly, MA, USA has shipped a Purion H200 SiC ion implant system to Wolfspeed Inc of Durham, NC, USA, which makes silicon carbide materials as well as silicon carbide (SiC) and gallium nitride (GaN) power-switching & RF semiconductor devices. The evaluation system will be used to support the production of power devices for electric vehicle (EV) applications.
“The power device market continues to grow rapidly and is a key driver of our growth globally,” notes Axcelis’ president & CEO Dr Russell Low. “We are pleased to continue to support Wolfspeed’s fab capacity expansion and are also excited about the potential of this new opportunity focused on high-current implant applications in silicon carbide power devices,” he adds.
“The popularity of electric vehicles is only steepening, and Wolfspeed is focused on scaling our capacity to meet the surge in demand for our silicon carbide devices,” says Missy Stigall, Wolfspeed’s senior VP of global fab operations. “We partnered with Axcelis due to their expertise, highly differentiated features, and process control capabilities that are essential for power device applications,” she adds. “Together, we will work to ease supply chain constraints as more and more EVs utilizing Wolfspeed’s silicon carbide technology are introduced to the market.”
Wolfspeed is currently engaged in a $6.5bn capacity expansion effort to dramatically increase production. This includes the John Palmour Manufacturing Center for Silicon Carbide, the world’s largest silicon carbide crystal growth facility, currently under construction in North Carolina, and the final build-out of the company’s Mohawk Valley Fab in New York. In February, Wolfspeed also announced its plans to build a highly automated 200mm wafer fabrication plant in Saarland, Germany.